Electrostatic micromechanical actuator with extended range of travel
نویسندگان
چکیده
منابع مشابه
Experimental Validation for an Extended-stability Electrostatic Actuator
A voltage regulator is developed to extend the operation range of a electrostatic actuator using a displacement feedback. The feedback actuator system can be used for continuous position tracking of step, ramp, or harmonic voltage signals. The electrostatic actuator is composed of a micro-cantilever beam electrode above a fixed electrode. The voltage difference between the two electrodes is reg...
متن کاملExtending the traveling range with a cascade electrostatic comb-drive actuator
Electrostatic comb-drive actuators have been developed and employed for many applications. However, side stability (side pull-in) limits the actuator stroke constraining its applications. Hence, extending the stable traveling range is an important issue for designing electrostatic comb-drive actuators. This study presents a novel cascade electrostatic comb-drive actuator. Instead of shifting th...
متن کاملRobust Control of an Electrostatic Microelectromechanical Actuator
A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fabricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors ... One of the problems with the electrostatic MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent po...
متن کاملReduction of Electrostatic Control Voltage with a Tri - Electrode Actuator †
We present a new tri-electrode topology for reducing the control voltage for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electro...
متن کاملShape Optimization of Electrostatically Actuated Micro Cantilever Beam with Extended Travel Range Using Simulated Annealing
The pull-in instability places substantial restrictions on the performance of electrostatically driven MEMS devices by limiting their range of travel. Our objective is to present a systematic method of carrying out optimal design of novel types of electrostatic beams that have enhanced travel ranges. In this paper, we implement a shape optimization methodology using simulated annealing to maxim...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2000
ISSN: 1057-7157,1941-0158
DOI: 10.1109/84.870058